Premium
Patterning of Solution‐Processed, Indium‐Free Oxide TFTs by Selective Spray Pyrolysis
Author(s) -
Zeumault Andre,
Scheideler William,
Grau Gerd,
Smith Jeremy,
Subramanian Vivek
Publication year - 2016
Publication title -
advanced electronic materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.25
H-Index - 56
ISSN - 2199-160X
DOI - 10.1002/aelm.201500326
Subject(s) - materials science , thin film transistor , nanotechnology , substrate (aquarium) , oxide , deposition (geology) , metallurgy , paleontology , oceanography , layer (electronics) , sediment , biology , geology
In situ, maskless, scalable patterning of metal oxide thin‐film transistors deposited via spray pyrolysis is demonstrated for the first time. Features are patterned by inkjet printing a hydrophobic polymer template onto a hydrophilic substrate prior to spraying, providing surface energy contrast to facilitate selective deposition. An average mobility of 22 cm 2 V −1 s −1 is obtained using 350 °C processing with high yield and low variability.
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom