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Patterning of Solution‐Processed, Indium‐Free Oxide TFTs by Selective Spray Pyrolysis
Author(s) -
Zeumault Andre,
Scheideler William,
Grau Gerd,
Smith Jeremy,
Subramanian Vivek
Publication year - 2016
Publication title -
advanced electronic materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.25
H-Index - 56
ISSN - 2199-160X
DOI - 10.1002/aelm.201500326
Subject(s) - materials science , thin film transistor , nanotechnology , substrate (aquarium) , oxide , deposition (geology) , metallurgy , paleontology , oceanography , layer (electronics) , sediment , biology , geology
In situ, maskless, scalable patterning of metal oxide thin‐film transistors deposited via spray pyrolysis is demonstrated for the first time. Features are patterned by inkjet printing a hydrophobic polymer template onto a hydrophilic substrate prior to spraying, providing surface energy contrast to facilitate selective deposition. An average mobility of 22 cm 2 V −1 s −1 is obtained using 350 °C processing with high yield and low variability.