Open AccessEngineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure Range
Author(s) -
Li Gang,
Chen Duo,
Li Chenglong,
Liu Wenxia,
Liu Hong
Publication year - 2020
Publication title -
advanced science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 5.388
H-Index - 100
ISSN - 2198-3844
DOI - 10.1002/advs.202000154
Subject(s) - pressure sensor , materials science , microstructure , polydimethylsiloxane , piezoresistive effect , composite material , sensitivity (control systems) , bending , pressure sensitive , optoelectronics , nanotechnology , electronic engineering , adhesive , mechanical engineering , engineering , layer (electronics)
Fabricating flexible pressure sensors with high sensitivity in a broad pressure range is still a challenge. Herein, a flexible pressure sensor with engineered microstructures on polydimethylsiloxane (PDMS) film is designed. The high performance of the sensor derives from its unique pyramid‐wall‐grid microstructure (PWGM). A square array of dome‐topped pyramids and crossed strengthening walls on the film forms a multiheight hierarchical microstructure. Two pieces of PWGM flexible PDMS film, stacked face‐to‐face, form a piezoresistive sensor endowed with ultrahigh sensitivity across a very broad pressure range. The sensitivity of the device is as high as 383 665.9 and 269 662.9 kPa −1 in the pressure ranges 0–1.6 and 1.6–6 kPa, respectively. In the higher pressure range of 6.1–11 kPa, the sensitivity is 48 689.1 kPa −1 , and even in the very high pressure range of 11–56 kPa, it stays at 1266.8 kPa −1 . The pressure sensor possesses excellent bending and torsional strain detection properties, is mechanically durable, and has potential applications in wearable biosensing for healthcare. In addition, 2 × 2 and 4 × 4 sensor arrays are prepared and characterized, suggesting the possibility of manufacturing a flexible tactile sensor.