Open AccessX‐Ray Optics: 3D Nanofabrication of High‐Resolution Multilayer Fresnel Zone Plates (Adv. Sci. 9/2018)
Author(s) -
Sanli Umut Tunca,
Jiao Chengge,
Baluktsian Margarita,
Grévent Corinne,
Hahn Kersten,
Wang Yi,
Srot Vesna,
Richter Gunther,
Bykova Iuliia,
Weigand Markus,
Schütz Gisela,
Keskinbora Kahraman
Publication year - 2018
Publication title -
advanced science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 5.388
H-Index - 100
ISSN - 2198-3844
DOI - 10.1002/advs.201870052
Subject(s) - zone plate , tapering , materials science , fresnel zone , optics , nanolithography , x ray optics , pillar , x ray , fabrication , physics , computer science , computer graphics (images) , medicine , alternative medicine , structural engineering , pathology , diffraction , engineering
In article 1800346 , Umut Tunca Sanli, Kahraman Keskinbora, and co‐workers fabricate multilayer Fresnel zone plate (ML‐FZP) type X‐ray lenses on optical fibers by depositing several hundred alternating layers of oxide super‐structures. 15 nm wide structures of a test object are resolved using the built X‐ray lenses. Moreover, a plasma focused ion beam is used for preparing micro‐pillar arrays with precise tapering angles enabling ML‐FZPs with zones precisely tilted to the Bragg angle.