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Room‐Temperature Fabricated Amorphous Ga 2 O 3 High‐Response‐Speed Solar‐Blind Photodetector on Rigid and Flexible Substrates
Author(s) -
Cui Shujuan,
Mei Zengxia,
Zhang Yonghui,
Liang Huili,
Du Xiaolong
Publication year - 2017
Publication title -
advanced optical materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.89
H-Index - 91
ISSN - 2195-1071
DOI - 10.1002/adom.201700454
Subject(s) - materials science , amorphous solid , photodetector , responsivity , optoelectronics , fabrication , x ray photoelectron spectroscopy , sputtering , nanotechnology , thin film , chemical engineering , chemistry , medicine , alternative medicine , organic chemistry , pathology , engineering
A solution to the fabrication of amorphous Ga 2 O 3 solar‐blind photodetectors on rigid and flexible substrates at room temperature is reported. A robust improvement in the response speed is achieved by delicately controlling the oxygen flux in the reactive radio frequency magnetron sputtering process. Temporal response measurements show that the detector on quartz has a fast decay time of 19.1 µs and a responsivity of 0.19 A W −1 as well, which are even better than those single crystal Ga 2 O 3 counterparts prepared at high temperatures. X‐ray photoelectron spectroscopy and current–voltage tests suggest that the reduced oxygen vacancy concentration and the increased Schottky barrier height jointly contribute to the faster response speed. Amorphous Ga 2 O 3 solar‐blind photodetector is further constructed on polyethylene naphthalate substrate. The flexible devices demonstrate similar photoresponse behavior as the rigid ones, and no significant degradation of the device performance is observed in bending states and fatigue tests. The results reveal the importance of finely tuned oxygen processing gas in promoting the device performance and the applicability of room‐temperature synthesized amorphous Ga 2 O 3 in fabrication of flexible solar‐blind photodetectors.