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Kinoform Optics: Single‐Step 3D Nanofabrication of Kinoform Optics via Gray‐Scale Focused Ion Beam Lithography for Efficient X‐Ray Focusing (Advanced Optical Materials 6/2015)
Author(s) -
Keskinbora Kahraman,
Grévent Corinne,
Hirscher Michael,
Weigand Markus,
Schütz Gisela
Publication year - 2015
Publication title -
advanced optical materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.89
H-Index - 91
ISSN - 2195-1071
DOI - 10.1002/adom.201570035
Subject(s) - optics , materials science , ion beam lithography , lithography , nanolithography , grayscale , extreme ultraviolet lithography , beam (structure) , optoelectronics , ion beam , physics , fabrication , medicine , alternative medicine , pixel , pathology
A kinoform lens designed for X‐ray point focusing, fabricated via grayscale ion‐beam lithography, is shown by C. Grévent and co‐workers. A high‐quality, continuous surface profile leads to almost 90% of the theoretical focusing efficiency, demonstrated on page 792 for soft X‐rays. This result paves the way to true kinoform X‐ray lenses for high‐energy electromagnetic radiation focusing with a very high efficiency.