Kinoform Optics: Single‐Step 3D Nanofabrication of Kinoform Optics via Gray‐Scale Focused Ion Beam Lithography for Efficient X‐Ray Focusing (Advanced Optical Materials 6/2015) | Zendy

Keskinbora Kahraman | Zendy; Grévent Corinne | Zendy; Hirscher Michael | Zendy; Weigand Markus | Zendy; Schütz Gisela | Zendy

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Kinoform Optics: Single‐Step 3D Nanofabrication of Kinoform Optics via Gray‐Scale Focused Ion Beam Lithography for Efficient X‐Ray Focusing (Advanced Optical Materials 6/2015)

Author(s) -

Keskinbora Kahraman,

Grévent Corinne,

Hirscher Michael,

Weigand Markus,

Schütz Gisela

Publication year - 2015

Publication title -

advanced optical materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 2.89

H-Index - 91

ISSN - 2195-1071

DOI - 10.1002/adom.201570035

Subject(s) - optics , materials science , ion beam lithography , lithography , nanolithography , grayscale , extreme ultraviolet lithography , beam (structure) , optoelectronics , ion beam , physics , fabrication , medicine , alternative medicine , pixel , pathology

A kinoform lens designed for X‐ray point focusing, fabricated via grayscale ion‐beam lithography, is shown by C. Grévent and co‐workers. A high‐quality, continuous surface profile leads to almost 90% of the theoretical focusing efficiency, demonstrated on page 792 for soft X‐rays. This result paves the way to true kinoform X‐ray lenses for high‐energy electromagnetic radiation focusing with a very high efficiency.

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