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All‐Around SiN Stressor for High and Homogeneous Tensile Strain in Germanium Microdisk Cavities
Author(s) -
Ghrib Abdelhamid,
El Kurdi Moustafa,
Prost Mathias,
Sauvage Sébastien,
Checoury Xavier,
Beaudoin Grégoire,
Chaigneau Marc,
Ossikovski Razvigor,
Sagnes Isabelle,
Boucaud Philippe
Publication year - 2015
Publication title -
advanced optical materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.89
H-Index - 91
ISSN - 2195-1071
DOI - 10.1002/adom.201400369
Subject(s) - germanium , materials science , strain (injury) , homogeneous , ultimate tensile strength , tensile strain , optoelectronics , optics , composite material , thermodynamics , physics , silicon , medicine
An all‐around stressor approach is presented to introduce homogeneous and high tensile strain, both in‐plane and vertically, into n ‐doped germanium microdisks. A maximum biaxial strain up to 1.5% is achieved, close to the requirement to obtain a direct band gap germanium. The possibilities to obtain in this configuration modal optical gain in germanium microdisk cavities are discussed.