Premium
Nanoelectromechanical Systems: Straining and Tuning Atomic Layer Nanoelectromechanical Resonators via Comb‐Drive MEMS Actuators (Adv. Mater. Technol. 2/2021)
Author(s) -
Xie Yong,
Lee Jaesung,
Wang Yanan,
Feng Philip X.L.
Publication year - 2021
Publication title -
advanced materials technologies
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.184
H-Index - 42
ISSN - 2365-709X
DOI - 10.1002/admt.202170008
Subject(s) - nanoelectromechanical systems , microelectromechanical systems , resonator , actuator , comb drive , materials science , silicon on insulator , optoelectronics , nanotechnology , silicon , electrical engineering , engineering , fabrication , alternative medicine , pathology , nanoparticle , medicine , nanomedicine
In article number 2000794, Yong Xie, Philip X.‐L. Feng, and co‐workers demonstrate the additive and heterogeneous integration of 2D nanoelectromechanical systems (NEMS) onto micro actuators made of mainstream silicon‐on‐insulator (SOI) comb‐drive microelectromechanical systems (MEMS), across several orders of magnitude in length scale, thus enabling a chip‐scale platform for strain engineering of 2D crystals, and for broad frequency tuning and quality (Q) factor enhancement in atomically thin NEMS resonators.