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Gas‐Phase 3D Printing: Gas‐Phase 3D Printing of Functional Materials (Adv. Mater. Technol. 12/2020)
Author(s) -
Huerta Cesar Arturo Masse,
Nguyen Viet H.,
Sekkat Abderrahime,
Crivello Chiara,
ToldraReig Fidel,
Veiga Pedro Brandao,
Quessada Serge,
Jimenez Carmen,
MuñozRojas David
Publication year - 2020
Publication title -
advanced materials technologies
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.184
H-Index - 42
ISSN - 2365-709X
DOI - 10.1002/admt.202070074
Subject(s) - materials science , deposition (geology) , nanotechnology , 3d printing , substrate (aquarium) , etching (microfabrication) , gas phase , layer (electronics) , head (geology) , atomic layer deposition , optoelectronics , composite material , chemistry , paleontology , oceanography , geomorphology , sediment , biology , geology
In article 2000657, David Muñoz‐Rojas and co‐workers report the area‐selective deposition of functional materials using customized spatial atomic layer deposition (SALD) close‐proximity heads. Customized heads can be easily fabricated through 3D printing in different materials, including cheap resins, and allow the deposition of custom patterns, including multiple materials, without the need for substrate pre‐patterning or intermediate etching steps. Designing a miniaturized SALD head with concentric gas channels, i.e. a SALD pen, 3D printing of functional materials can be performed with nanometric resolution in Z.