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One‐Step Fabrication of Nanocrystalline Nanonetwork SnO 2 Gas Sensors by Integrated Multilaser Processing
Author(s) -
Lei Jincheng,
Zhang Qi,
Zhao Zeyu,
Chen Yizheng,
Gao Jennifer,
Tong Jianhua,
Peng Fei,
Xiao Hai
Publication year - 2020
Publication title -
advanced materials technologies
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.184
H-Index - 42
ISSN - 2365-709X
DOI - 10.1002/admt.202000281
Subject(s) - materials science , nanocrystalline material , annealing (glass) , crystallinity , raman spectroscopy , electrode , fabrication , substrate (aquarium) , coating , microstructure , grain size , pulsed laser deposition , nanotechnology , thin film , optoelectronics , optics , composite material , chemistry , medicine , physics , alternative medicine , oceanography , pathology , geology
An integrated multilaser process is developed to fabricate nanocrystalline nanonetwork SnO 2 gas sensors in one integrated procedure, which combines electrodes fabrication, nanomaterials deposition, and postannealing. Interdigit electrodes are fabricated on an Au‐coated fused silica substrate using a picosecond (ps) laser, which ablates the Au coating from the back of the substrate to pattern the electrodes. A novel transmitted Ps laser deposition (TPLD) process is designed to deposit SnO 2 nanonetwork on the interdigit electrodes with precise deposition area control under a close target‐to‐substrate distance. The obtained SnO 2 nanonetwork is in situ postannealed by a CO 2 laser to improve the crystallinity, while the nano morphology and grain size keep intact. To investigate the morphology and formation process of the nanonetwork, the microstructure of the laser‐deposited SnO 2 layer is characterized. The crystallization control of CO 2 laser annealing is investigated through analyzing the Raman spectrum, X‐ray diffraction (XRD) patterns, and lattice structures of the samples. By exposed to H 2 atmosphere, the fabricated gas sensor is demonstrated for H 2 monitoring.