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Silicon Photonic Platform for Passive Waveguide Devices: Materials, Fabrication, and Applications
Author(s) -
Su Yikai,
Zhang Yong,
Qiu Ciyuan,
Guo Xuhan,
Sun Lu
Publication year - 2020
Publication title -
advanced materials technologies
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.184
H-Index - 42
ISSN - 2365-709X
DOI - 10.1002/admt.201901153
Subject(s) - silicon photonics , photonics , fabrication , materials science , optoelectronics , waveguide , microelectronics , hybrid silicon laser , silicon , polarization (electrochemistry) , medicine , alternative medicine , pathology , chemistry
Silicon photonics has attracted tremendous interest from academia and industry, as the fabrication of the silicon family of photonic devices is mostly compatible with the microelectronics process using complementary metal‐oxide semiconductors (CMOS). Herein, three silicon‐family materials are discussed: silicon, silicon nitride, and silica. In addition, hybrid integration with a 2D material, graphene, is examined. First, the material and waveguide properties are reviewed. Second, typical fabrication processes for waveguide devices are introduced. Subsequently, a variety of passive waveguide devices, operating at different physical dimensions covering wavelength, polarization, and mode, are discussed. They correspond to fixed and tunable filters, polarization beam splitters and rotators, and mode conversion and multiplexing devices. These passive waveguide devices play important roles in a wide range of applications including telecom, interconnects, computing, sensing, quantum information processing, bio‐photonics, and energy.