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Atomic Force Microscope‐Based Meniscus‐Confined Three‐Dimensional Electrodeposition
Author(s) -
Eliyahu David,
Gileadi Eliezer,
Galun Ehud,
Eliaz Noam
Publication year - 2020
Publication title -
advanced materials technologies
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.184
H-Index - 42
ISSN - 2365-709X
DOI - 10.1002/admt.201900827
Subject(s) - materials science , meniscus , nanotechnology , quartz crystal microbalance , microscope , optoelectronics , atomic force microscopy , borosilicate glass , composite material , optics , chemistry , physics , incidence (geometry) , organic chemistry , adsorption
The development of a 3D electrochemical deposition system, which combines meniscus‐confined electrodeposition (MCED) with atomic force microscope (AFM) closed‐loop control and has a submicron resolution, is described. Thanks to the high rigidity of the hollow borosilicate glass (or quartz) tip and quartz crystal tuning fork (QTF), combined with the QTF's high force sensitivity, the use of a solution‐filled AFM tip in air is successful. The AFM control enables full automation and in situ growth control. Using this scheme, 3D printing of high‐quality, fully dense, uniform and exceptionally smooth, freestanding straight and overhang pure polycrystalline copper pillars, with diameters ranging from 1.5 µm to 250 nm, and an aspect ratio > 100, is demonstrated. This process may be useful for manufacturing of high‐frequency terahertz antennas, high‐density interconnects, precision sensors, micro‐ and nano‐electromechanical systems, batteries, and fuel cells, as well as for repair or modification of existing micro‐sized or nano‐sized features.