Premium
Ultrahigh Performance On‐Chip Single Crystal Diamond NEMS/MEMS with Electrically Tailored Self‐Sensing Enhancing Actuation
Author(s) -
Liao Meiyong,
Sang Liwen,
Teraji Tokuyuki,
Koizumi Satoshi,
Koide Yasuo
Publication year - 2019
Publication title -
advanced materials technologies
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.184
H-Index - 42
ISSN - 2365-709X
DOI - 10.1002/admt.201800325
Subject(s) - nanoelectromechanical systems , microelectromechanical systems , diamond , materials science , nanotechnology , optoelectronics , chip , electrical engineering , engineering , nanomedicine , nanoparticle , composite material
All‐electrical nano‐electromechanical or micro‐electromechanical systems (NEMS/MEMS) with integrated sensing and actuation are essential to fulfill the functionalities of single‐crystal diamond (SCD) NEMS/MEMS by integrated circuits for sensors or quantum systems. However, the implementation of all‐electrical on‐chip SCD NEMS/MEMS transducers has encountered bottlenecks due to the lack of shallow dopants in diamond and the difficulty of integrating active materials on diamond. In the present work, an on‐chip SCD NEMS/MEMS with unprecedented figure‐of‐merits is demonstrated by proposing a self‐sensing enhancing actuation scheme to circumvent the bottlenecks in diamond. The on‐chip SCD NEMS/MEMS show high self‐sensitivity, low actuation voltage, little energy dissipation, and high‐frequency and high‐temperature operation (873 K). The present work provides a platform for the development of ultrahigh‐performance and robust SCD NEMS/MEMS in sensors and quantum science fields, superior to other semiconductors.