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An Efficient and Low‐Cost Photolithographic‐Pattern‐Transfer Technique to Fabricate Electrode Arrays for Micro‐/Nanoelectronics
Author(s) -
Li Yongtao,
Huang Le,
Zhong Mianzeng,
Wei Zhongming,
Li Jingbo
Publication year - 2016
Publication title -
advanced materials technologies
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.184
H-Index - 42
ISSN - 2365-709X
DOI - 10.1002/admt.201600001
Subject(s) - nanoelectronics , materials science , nanotechnology , electrode , transfer printing , optoelectronics , composite material , chemistry
A novel and low‐cost technique for fabricating electrode arrays of micro‐/nanoelectronics is proposed. Such photolithographic pattern transfer is especially reliable for the 2D‐material‐based (opto)electronics such as transistors, top gate devices, Hall bars, heterostructure diodes, etc.