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Nanostructured Transparent Conductive Electrodes for Applications in Harsh Environments Fabricated via Nanosecond Laser‐Induced Periodic Surface Structures (LIPSS) in Indium–Tin Oxide Films on Glass
Author(s) -
Reinhardt Hendrik Martin,
Maier Philipp,
Kim HeeCheol,
Rhinow Daniel,
Hampp Norbert
Publication year - 2019
Publication title -
advanced materials interfaces
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.671
H-Index - 65
ISSN - 2196-7350
DOI - 10.1002/admi.201900401
Subject(s) - materials science , indium tin oxide , nanosecond , optoelectronics , electrical conductor , laser , electrode , transparent conducting film , indium , tin oxide , borosilicate glass , thin film , nanotechnology , optics , composite material , doping , chemistry , physics
A self‐organization phenomenon named laser‐induced periodic surface structures (LIPSS) is utilized for pattern formation in indium–tin oxide (ITO) transparent conductive films coated on borosilicate glass. Stripe patterns with periodicities down to 175 nm are created by scanning the focused beam (30 µm spot diameter 1 e −2 ) of a nanosecond pulsed laser operating at 532 nm wavelength over ITO films. Highly ordered ITO‐LIPSS are generated at a pulse duration of 6 ns, pulse frequencies between 100 and 200 kHz, pulse energies around 20 µJ, and laser spot scan speeds in the range of 50–80 mm s −1 . Resulting nanopatterns are electrically conductive and feature improved optical transparency as well as stability against strong acids such as hydrochloric acid, sulfuric acid, and even aqua regia. The formation of mixed phases between ITO and silicon is considered to be the origin for the chemical robustness of laser patterned transparent conductive electrodes.