Premium
High Performance of a‐IZTO TFT by Purification of the Semiconductor Oxide Precursor
Author(s) -
Bukke Ravindra Naik,
Mude Narendra Naik,
Saha Jewel Kumer,
Jang Jin
Publication year - 2019
Publication title -
advanced materials interfaces
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.671
H-Index - 65
ISSN - 2196-7350
DOI - 10.1002/admi.201900277
Subject(s) - materials science , thin film transistor , impurity , oxide thin film transistor , threshold voltage , amorphous solid , oxide , analytical chemistry (journal) , semiconductor , indium , transistor , inorganic chemistry , optoelectronics , layer (electronics) , voltage , nanotechnology , crystallography , metallurgy , electrical engineering , chemistry , organic chemistry , engineering , chromatography
The effect of purification of oxide semiconductor precursor on the performance of amorphous indium–zinc–tin oxide (a‐IZTO) thin‐film transistors (TFT) using a high‐k zirconium oxide (ZrO x ) gate insulator is reported. By purification of IZTO precursor, the saturation mobility ( µ sat ) of the IZTO TFT increases from 2.84 to 9.50 cm 2 V −1 s −1 , threshold voltage ( V TH ) decreases from 0.63 to 0.51 V, subthreshold swing (SS) decreases from 169 to 87 mV dec −1 , hysteresis voltage ( V H ) reduces from 0.05 to 0 V, and an ON/OFF current ratio ( I ON / I OFF ) increases from ≈10 7 to ≈10 8 . These improvements are due to the reduction in the impurities and oxygen vacancies at the bulk of IZTO and a‐IZTO/ZrO x interface as well. The significant reduction of broad absorbance peak centered at 553 nm can be found by purification, which is direct evidence of the reduction of the impurity concentration in the metal oxide precursor solution.