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Nanostructural Analysis of Porous Oblique Angle Deposited (OAD) Multilayer Systems by Grazing‐Incidence Small‐Angle X‐Ray Scattering
Author(s) -
OlivaRamírez Manuel,
LópezSantos Carmen,
Yubero Francisco,
GonzálezElipe Agustín R.
Publication year - 2018
Publication title -
advanced materials interfaces
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.671
H-Index - 65
ISSN - 2196-7350
DOI - 10.1002/admi.201800530
Subject(s) - grazing incidence small angle scattering , materials science , scattering , substrate (aquarium) , thin film , scanning electron microscope , small angle x ray scattering , stacking , optics , porosity , nanotechnology , composite material , small angle neutron scattering , nuclear magnetic resonance , physics , oceanography , neutron scattering , geology
This work reports a thorough characterization analysis of various porous thin film multilayers by means of grazing‐incidence small‐angle X‐ray scattering (GISAXS). Alternated TiO 2 /SiO 2 nanocolumnar layers deposited at oblique angles are fabricated in slanted, chiral, and zig‐zag configurations by rotating azimuthally the substrate from one layer to the next. Multilayer systems formed by the stacking of 3 and 15 alternant thin films of these two oxides are morphologically characterized by scanning electron microscopy (SEM) and structurally by GISAXS. This technique has provided a means to determine various vertical and lateral correlation lengths and to assess the anisotropic electron density distribution along the structural elements existing in the multilayers. This information can be systematically used to account for the actual arrangement of nanostructural elements in multilayer systems.