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Atomic Layer Deposition of Zinc Glutarate Thin Films
Author(s) -
Salmi Leo D.,
Mattinen Miika,
Niemi Teemu,
Heikkilä Mikko J.,
Mizohata Kenichiro,
Korhonen Sanna,
Hirvonen SamiPekka,
Räisänen Jyrki,
Ritala Mikko
Publication year - 2017
Publication title -
advanced materials interfaces
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.671
H-Index - 65
ISSN - 2196-7350
DOI - 10.1002/admi.201700512
Subject(s) - zinc , materials science , elastic recoil detection , thin film , fourier transform infrared spectroscopy , atomic layer deposition , analytical chemistry (journal) , spectroscopy , layer (electronics) , scanning electron microscope , deposition (geology) , infrared spectroscopy , energy dispersive x ray spectroscopy , inorganic chemistry , chemical engineering , chemistry , nanotechnology , organic chemistry , metallurgy , composite material , paleontology , physics , quantum mechanics , sediment , engineering , biology
Abstract Deposition of zinc glutarate thin films by atomic layer deposition is studied at 200–250 °C using zinc acetate and glutaric acid as the precursors. The films are characterized by UV–vis spectrophotometry, X‐ray diffraction, Fourier transform infrared spectroscopy, field emission scanning electron microscopy, energy‐dispersive X‐ray spectroscopy, atomic force microscopy, and time‐of‐flight elastic recoil detection analysis. According to X‐ray diffraction, the films deposited at 200 °C are crystalline with a crystal structure matching to zinc glutarate. The elastic recoil detection analysis shows that the composition of the films is a close match to zinc glutarate. Catalytic activity of the films is demonstrated using the copolymerization reaction of propylene oxide and CO 2 .