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Micromechanical Systems: Atomic Layer Deposition for Membranes, Metamaterials, and Mechanisms (Adv. Mater. 29/2019)
Author(s) -
Dorsey Kyle J.,
Pearson Tanner G.,
Esposito Edward,
Russell Sierra,
Bircan Baris,
Han Yimo,
Miskin Marc Z.,
Muller David A.,
Cohen Itai,
McEuen Paul L.
Publication year - 2019
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201970212
Subject(s) - materials science , atomic layer deposition , microfabrication , nanotechnology , actuator , metamaterial , layer (electronics) , optoelectronics , deposition (geology) , electronics , flexible electronics , nanometre , membrane , composite material , fabrication , electrical engineering , engineering , medicine , paleontology , alternative medicine , genetics , pathology , sediment , biology
In article number 1901944, Itai Cohen, and Paul L. McEuen, and co‐workers describe micromechanical structures, metamaterials, and actuators fabricated from nanometer‐thick films produced by atomic‐layer deposition (ALD) on sacrificial layers. Devices fabricated in this way are extraordinarily sensitive to small forces and torques because they exhibit ultralow bending stiffness. The microfabrication process is compatible with semiconductor processing, enabling seamless integration of ALD actuators and electronics for applications in microrobotics.