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Integrated Circuits Comprising Patterned Functional Liquids
Author(s) -
Prasad Bhagwati,
Pfanzelt Georg,
FillisTsirakis Evangelos,
Zachman Michael J.,
Kourkoutis Lena F.,
Mannhart Jochen
Publication year - 2018
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201802598
Subject(s) - materials science , electronic circuit , electronics , heterojunction , integrated circuit , nanotechnology , capacitor , transistor , solid state , optoelectronics , engineering physics , electrical engineering , voltage , engineering
Solid‐state heterostructures are the cornerstone of modern electronics. To enhance the functionality and performance of integrated circuits, the spectrum of materials used in the heterostructures is being expanded by an increasing number of compounds and elements of the periodic table. While the integration of liquids and solid–liquid interfaces into such systems would allow unique and advanced functional properties and would enable integrated nanoionic circuits, solid‐state heterostructures that incorporate liquids have not been considered thus far. Here solid‐state heterostructures with integrated liquids are proposed, realized, and characterized, thereby opening a vast, new phase space of materials and interfaces for integrated circuits. Devices containing tens of microscopic capacitors and field‐effect transistors are fabricated by using integrated patterned NaCl aqueous solutions. This work paves the way to integrated electronic circuits that include highly integrated liquids, thus yielding a wide array of novel research and application opportunities based on microscopic solid/liquid systems.