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Synthesis and Properties of a Photopatternable Lithium‐Ion Conducting Solid Electrolyte
Author(s) -
Choi Christopher S.,
Lau Jonathan,
Hur Janet,
Smith Leland,
Wang Chunlei,
Dunn Bruce
Publication year - 2018
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201703772
Subject(s) - materials science , photoresist , electrolyte , ionic conductivity , microelectronics , lithium (medication) , electrochemistry , nanotechnology , thin film , fast ion conductor , amorphous solid , silicon , electrochemical window , ionic bonding , ion , conductivity , resist , chemical engineering , electrode , optoelectronics , layer (electronics) , organic chemistry , chemistry , medicine , endocrinology , engineering
One of the important considerations for the development of on‐chip batteries is the need to photopattern the solid electrolyte directly on electrodes. Herein, the photopatterning of a lithium‐ion conducting solid electrolyte is demonstrated by modifying a well‐known negative photoresist, SU‐8, with LiClO 4 . The resulting material exhibits a room temperature ionic conductivity of 52 µS cm −1 with a wide electrochemical window (>5 V). Half‐cell galvanostatic testing of 3 µm thin films spin‐coated on amorphous silicon validates its use for on‐chip energy‐storage applications. The modified SU‐8 possesses excellent mechanical integrity, is thermally stable up to 250 °C, and can be photopatterned with micrometer‐scale resolution. These results present a promising direction for the integration of electrochemical energy storage in microelectronics.