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Graphene‐Contacted Ultrashort Channel Monolayer MoS 2 Transistors
Author(s) -
Xie Li,
Liao Mengzhou,
Wang Shuopei,
Yu Hua,
Du Luojun,
Tang Jian,
Zhao Jing,
Zhang Jing,
Chen Peng,
Lu Xiaobo,
Wang Guole,
Xie Guibai,
Yang Rong,
Shi Dongxia,
Zhang Guangyu
Publication year - 2017
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201702522
Subject(s) - materials science , graphene , monolayer , ohmic contact , optoelectronics , nanotechnology , transistor , semiconductor , field effect transistor , fabrication , electronics , electrical engineering , voltage , medicine , alternative medicine , engineering , layer (electronics) , pathology
2D semiconductors are promising channel materials for field‐effect transistors (FETs) with potentially strong immunity to short‐channel effects (SCEs). In this paper, a grain boundary widening technique is developed to fabricate graphene electrodes for contacting monolayer MoS 2 . FETs with channel lengths scaling down to ≈4 nm can be realized reliably. These graphene‐contacted ultrashort channel MoS 2 FETs exhibit superior performances including the nearly Ohmic contacts and excellent immunity to SCEs. This work provides a facile route toward the fabrication of various 2D material‐based devices for ultrascaled electronics.

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