Premium
Intrinsically Stretchable Biphasic (Solid–Liquid) Thin Metal Films
Author(s) -
Hirsch Arthur,
Michaud Hadrien O.,
Gerratt Aaron P.,
de Mulatier Séverine,
Lacour Stéphanie P.
Publication year - 2016
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201506234
Subject(s) - materials science , nanotechnology , thin film , photolithography , sheet resistance , chemical vapor deposition , electrical conductor , composite material , layer (electronics)
Stretchable biphasic conductors are formed by physical vapor deposition of gallium onto an alloying metal film. The properties of the photolithography‐compatible thin metal films are highlighted by low sheet resistance (0.5 Ω sq −1 ) and large stretchability (400%). This novel approach to deposit and pattern liquid metals enables extremely robust, multilayer and soft circuits, sensors, and actuators.