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Spontaneous Patterning of High‐Resolution Electronics via Parallel Vacuum Ultraviolet
Author(s) -
Liu Xuying,
Kanehara Masayuki,
Liu Chuan,
Sakamoto Kenji,
Yasuda Takeshi,
Takeya Jun,
Minari Takeo
Publication year - 2016
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201506151
Subject(s) - materials science , vacuum ultraviolet , electronics , transistor , ultraviolet , organic electronics , optoelectronics , channel (broadcasting) , nanotechnology , computer science , optics , electrical engineering , telecommunications , physics , voltage , engineering
A spontaneous patterning technique via parallel vacuum ultraviolet is developed for fabricating large‐scale, complex electronic circuits with 1 μm resolution. The prepared organic thin‐film transistors exhibit a low contact resistance of 1.5 kΩ cm, and high mobilities of 0.3 and 1.5 cm 2 V −1 s −1 in the devices with channel lengths of 1 and 5 μm, respectively.