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Crack‐Defined Electronic Nanogaps
Author(s) -
Dubois Valentin,
Niklaus Frank,
Stemme Göran
Publication year - 2016
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201504569
Subject(s) - materials science , nanotechnology
Achieving near‐atomic‐scale electronic nanogaps in a reliable and scalable manner will facilitate fundamental advances in molecular detection, plasmonics, and nanoelectronics. Here, a method is shown for realizing crack‐defined nanogaps separating TiN electrodes, allowing parallel and scalable fabrication of arrays of sub‐10 nm electronic nanogaps featuring individually defined gap widths.