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Chemical Vapor Deposition of Large‐Sized Hexagonal WSe 2 Crystals on Dielectric Substrates
Author(s) -
Chen Jianyi,
Liu Bo,
Liu Yanpeng,
Tang Wei,
Nai Chang Tai,
Li Linjun,
Zheng Jian,
Gao Libo,
Zheng Yi,
Shin Hyun Suk,
Jeong Hu Young,
Loh Kian Ping
Publication year - 2015
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201503446
Subject(s) - materials science , chemical vapor deposition , dielectric , hexagonal crystal system , deposition (geology) , optoelectronics , chemical engineering , analytical chemistry (journal) , nanotechnology , crystallography , organic chemistry , chemistry , paleontology , sediment , biology , engineering
High‐quality large‐sized hexagoal WSe 2 crystals can be grown on dielectric substrates using atmospheric chemical vapor deposition in the presence of hydrogen gas. These hexagonal crystals (lateral width >160 um) have a carrier mobility of 100 cm 2 V −1 s −1 and a photoresponsivity of ≈1100 mA W −1 , which is comparable to that of exfoliated flakes.