Premium
Direct Top‐Down Fabrication of Large‐Area Graphene Arrays by an In Situ Etching Method
Author(s) -
Geng Dechao,
Wang Huaping,
Wan Yu,
Xu Zhiping,
Luo Birong,
Xu Jie,
Yu Gui
Publication year - 2015
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201501524
Subject(s) - graphene , materials science , fabrication , nanotechnology , etching (microfabrication) , in situ , physics , medicine , alternative medicine , pathology , layer (electronics) , meteorology
Large‐area aligned hexagonal graphene arrays are directly fabricated by an in situ etching method. With precise control over the size, shape, and orientation, the technique allows hydrogen to be employed as an effective etchant on chemical vapor deposited graphene and leads to ordered graphene nanostructures. This direct top‐down approach can enable atomically precise construction of integrated devices from single graphene sheets with a wide range of technological applications.