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Three‐Dimensional Nanofabrication by Block Copolymer Self‐Assembly
Author(s) -
Ross Caroline A.,
Berggren Karl K.,
Cheng Joy Y.,
Jung Yeon Sik,
Chang JaeByum
Publication year - 2014
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201400386
Subject(s) - nanolithography , copolymer , materials science , fabrication , nanotechnology , nanostructure , self assembly , nanoscopic scale , block (permutation group theory) , polymer , composite material , medicine , alternative medicine , geometry , mathematics , pathology
Thin films of block copolymers are widely seen as enablers for nanoscale fabrication of semiconductor devices, membranes, and other structures, taking advantage of microphase separation to produce well‐organized nanostructures with periods of a few nm and above. However, the inherently three‐dimensional structure of block copolymer microdomains could enable them to make 3D devices and structures directly, which could lead to efficient fabrication of complex heterogeneous structures. This article reviews recent progress in developing 3D nanofabrication processes based on block copolymers.