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Direct‐Write Thermocapillary Dewetting of Polymer Thin Films by a Laser‐Induced Thermal Gradient
Author(s) -
Singer Jonathan P.,
Lin PaoTai,
Kooi Steven E.,
Kimerling Lionel C.,
Michel Jurgen,
Thomas Edwin L.
Publication year - 2013
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201302777
Subject(s) - dewetting , materials science , lithography , polymer , thermal , laser , wavelength , thin film , optoelectronics , optics , nanotechnology , composite material , physics , meteorology
A positive‐tone 2D direct‐write technique that can achieve sub‐wavelength patterning by non‐linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free‐space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent‐free.