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Microlens Arrays: Fabrication of Microlens Arrays with Well‐controlled Curvature by Liquid Trapping and Electrohydrodynamic Deformation in Microholes (Adv. Mater. 23/2012)
Author(s) -
Li Xiangming,
Ding Yucheng,
Shao Jinyou,
Tian Hongmiao,
Liu Hongzhong
Publication year - 2012
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201290137
Subject(s) - microlens , materials science , wafer , curvature , fabrication , photolithography , nanotechnology , optoelectronics , optics , lens (geology) , medicine , physics , geometry , mathematics , alternative medicine , pathology
Y. C. Ding, J. Y. Shao, and co‐workers demonstrate a creative and economic method for manufacturing large‐area microlens arrays (MLAs) with controllable curvature and supersmooth surfaces. On page OP 165 , the production of a concave MLA is achieved by electrohydrodynamically deforming the surface of a photocurable prepolymer trapped in microhole array which has been etched onto a doped silicon wafer. The concave MLA is then used as a master to generate the convex MLA via vacuum micromoulding.