Micromechanical Resonators: AlN/3C–SiC Composite Plate Enabling High‐Frequency and High‐ Q  Micromechanical Resonators (Adv. Mater. 20/2012) | Zendy

Lin ChihMing | Zendy; Chen YungYu | Zendy; Felmetsger Valery V. | Zendy; Senesky Debbie G. | Zendy; Pisano Albert P. | Zendy

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Micromechanical Resonators: AlN/3C–SiC Composite Plate Enabling High‐Frequency and High‐ Q Micromechanical Resonators (Adv. Mater. 20/2012)

Author(s) -

Lin ChihMing,

Chen YungYu,

Felmetsger Valery V.,

Senesky Debbie G.,

Pisano Albert P.

Publication year - 2012

Publication title -

advanced materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 10.707

H-Index - 527

eISSN - 1521-4095

pISSN - 0935-9648

DOI - 10.1002/adma.201290115

Subject(s) - materials science , resonator , composite number , coupling (piping) , composite material , epitaxy , layer (electronics) , optoelectronics

An AlN/3C–SiC composite is used to realize high‐frequency and high‐Q acoustic wave resonators by exploiting the third‐order quasi‐symmetric (QS 3 ) Lamb wavemode, as described by C.‐M. Lin, Y.‐Y. Chen, and co‐workers on page 2722 . The epitaxial 3C–SiC layer enhances the electromechanical coupling of the QS 3 mode and boosts the Q due to the intrinsic low acoustic loss of SiC crystals. This AlN/3C–SiC composite plate structure enables production of high‐performance micromechanical acoustic wave resonators for frequency control and sensing applications.

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