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Hybrid High‐Resolution Three‐Dimensional Nanofabrication for Metamaterials and Nanoplasmonics
Author(s) -
Staude Isabelle,
Decker Manuel,
Ventura Michael J.,
Jagadish Chennupati,
Neshev Dragomir N.,
Gu Min,
Kivshar Yuri S.
Publication year - 2013
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201203564
Subject(s) - materials science , nanolithography , metamaterial , nanotechnology , lithography , fabrication , plasmon , characterization (materials science) , electron beam lithography , resonator , computer science , optoelectronics , layer (electronics) , alternative medicine , pathology , resist , medicine
We propose a novel hybrid fabrication approach that combines direct laser writing with a subsequent electron‐beam lithography step . This approach allows realizing out‐of‐plane plasmonic nanostructures with truly nanoscopic feature sizes. The excellent quality of the obtained structures is evidenced by optical characterization of upright‐standing split‐ring resonator arrays fabricated along these lines.