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Use of a Columnar Metal Thin Film as a Nanosieve with Sub‐10 nm Pores
Author(s) -
Choi DongHoon,
Han Yong Duk,
Lee ByungKee,
Choi SeonJin,
Yoon Hyun C.,
Lee DaeSik,
Yoon JunBo
Publication year - 2012
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201200755
Subject(s) - materials science , nanopore , thin film , physical vapor deposition , nanotechnology , chemical vapor deposition , deposition (geology) , paleontology , sediment , biology
A columnar‐structured nanosieve is unique in the sense that it is a general thin film formed by physical vapor deposition (PVD). Instead of additional processes to make nanopores, the numerous voids naturally formed among columnar grains during PVD are used as nanopores. Since the thin film formed by PVD has vertically grown columnar grains, the fabricated nanosieve has numerous straight‐opened nanopores, which is an ideal structure for a nanosieve.