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Carbon Nanotubes: Integrated Carbon Nanotube Array as Dry Adhesive for High‐Temperature Silicon Processing (Adv. Mater. 37/2011)
Author(s) -
Eun Youngkee,
Lee JaeIk,
Choi Jungwook,
Song Youngsup,
Kim Jongbaeg
Publication year - 2011
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201190148
Subject(s) - materials science , carbon nanotube , adhesive , microstructure , nanotechnology , fabrication , adhesion , composite material , silicon , optoelectronics , layer (electronics) , medicine , alternative medicine , pathology
Carbon nanotube (CNT) arrays are used as removable dry adhesives for high‐temperature processes. As reported by Jongbaeg Kim and co‐workers on page 4285 , the adhesion force between the self‐assembled CNTs is used to strain the microstructures in high‐temperature environments. Arrays of analog micromirrors are successfully fabricated by CNT adhesives and the proposed method could be expanded to diverse 3D microstructure fabrication.