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Nanomanufacturing: Direct Fabrication of Arbitrary‐Shaped Ferroelectric Nanostructures on Plastic, Glass, and Silicon Substrates (Adv. Mater. 33/2011)
Author(s) -
Kim Suenne,
Bastani Yaser,
Lu Haidong,
King William P.,
Marder Seth,
Sandhage Kenneth H.,
Gruverman Alexei,
Riedo Elisa,
BassiriGharb Nazanin
Publication year - 2011
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201190130
Subject(s) - nanomanufacturing , materials science , fabrication , piezoelectricity , ferroelectricity , nanotechnology , pyroelectricity , ferroelectric ram , nanolithography , silicon , optoelectronics , semiconductor , transducer , nanostructure , ferroelectric capacitor , composite material , electrical engineering , dielectric , medicine , alternative medicine , engineering , pathology
On page 3786 Suenne Kim, Nazanin Bassiri‐Gharb, and co‐workers report on the use of thermochemical nanolithography for direct and complimentary metal–oxide–semiconductor (CMOS)‐compatible fabrication of perovskite‐based ferroelectric materials. Such nanostructured piezoelectric materials are highly attractive for a variety of applications, including miniaturized energy harvesting devices, piezoelectric sensors, actuators, and transducers, as well as pyroelectric sensors and memory devices.