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AlN/3C–SiC Composite Plate Enabling High‐Frequency and High‐ Q Micromechanical Resonators
Author(s) -
Lin ChihMing,
Chen YungYu,
Felmetsger Valery V.,
Senesky Debbie G.,
Pisano Albert P.
Publication year - 2012
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201104842
Subject(s) - resonator , materials science , composite number , lamb waves , piezoelectricity , resonance (particle physics) , electrical impedance , q factor , optoelectronics , composite material , optics , surface wave , electrical engineering , physics , atomic physics , engineering
An AlN/3C–SiC composite layer enables the third‐order quasi‐symmetric (QS 3 ) Lamb wave mode with a high quality factor ( Q ) characteristic and an ultra‐high phase velocity up to 32395 ms −1 . A Lamb wave resonator utilizing the QS 3 mode exhibits a low motional impedance of 91 Ω and a high Q of 5510 at a series resonance frequency ( f s ) of 2.92 GHz, resulting in the highest f s · Q product of 1.61 × 10 13 Hz among the suspended piezoelectric thin film resonators reported to date.