AlN/3C–SiC Composite Plate Enabling High‐Frequency and High‐ Q  Micromechanical Resonators | Zendy

Lin ChihMing | Zendy; Chen YungYu | Zendy; Felmetsger Valery V. | Zendy; Senesky Debbie G. | Zendy; Pisano Albert P. | Zendy

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AlN/3C–SiC Composite Plate Enabling High‐Frequency and High‐ Q Micromechanical Resonators

Author(s) -

Lin ChihMing,

Chen YungYu,

Felmetsger Valery V.,

Senesky Debbie G.,

Pisano Albert P.

Publication year - 2012

Publication title -

advanced materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 10.707

H-Index - 527

eISSN - 1521-4095

pISSN - 0935-9648

DOI - 10.1002/adma.201104842

Subject(s) - resonator , materials science , composite number , lamb waves , piezoelectricity , resonance (particle physics) , electrical impedance , q factor , optoelectronics , composite material , optics , surface wave , electrical engineering , physics , atomic physics , engineering

An AlN/3C–SiC composite layer enables the third‐order quasi‐symmetric (QS 3 ) Lamb wave mode with a high quality factor ( Q ) characteristic and an ultra‐high phase velocity up to 32395 ms −1 . A Lamb wave resonator utilizing the QS 3 mode exhibits a low motional impedance of 91 Ω and a high Q of 5510 at a series resonance frequency ( f s ) of 2.92 GHz, resulting in the highest f s · Q product of 1.61 × 10 13 Hz among the suspended piezoelectric thin film resonators reported to date.

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