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Fabrication of Graphene Nanomesh by Using an Anodic Aluminum Oxide Membrane as a Template
Author(s) -
Zeng Zhiyuan,
Huang Xiao,
Yin Zongyou,
Li Hong,
Chen Yang,
Li Hai,
Zhang Qing,
Ma Jan,
Boey Freddy,
Zhang Hua
Publication year - 2012
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201104281
Subject(s) - nanomesh , graphene , materials science , oxide , fabrication , anodic aluminum oxide , membrane , nanotechnology , metallurgy , medicine , alternative medicine , pathology , biology , genetics
Large‐area graphene nanomesh (GNM) is prepared using a new and effective method, in which the O 2 plasma treatment is used with an anodic aluminum oxide (AAO) membrane as an etch mask. By varying the pore size and cell wall thickness of the AAO membrane, GNM with tunable pore size and neck width can be prepared. As proof of concept, a field‐effect transistor with 15 nm neck width GNM as the conductive channel is fabricated, which exhibits p‐type semiconducting behavior.