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Direct Probing of Nanodimensioned Oxide Multilayers with the Aid of Focused Ion Beam Milling
Author(s) -
Kuru Yener,
Jalili Helia,
Cai Zhuhua,
Yildiz Bilge,
Tuller Harry L.
Publication year - 2011
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201102401
Subject(s) - materials science , focused ion beam , ion milling machine , ion beam , oxide , layer (electronics) , beam (structure) , ion , microscopy , optics , optoelectronics , nanotechnology , metallurgy , physics , quantum mechanics
The La 0.65 Sr 0.35 MnO 3 (LSM)/SrTi 0.2 Fe 0.8 O 3 (STF) multilayer is observed using scanning probe microscopy following a focused‐ion beam milling process with shallow incidence angle. Although the nominal thickness of each layer is about 5 nm, the exposed layers are magnified by several orders of magnitude on the surface after FIB cutting. This procedure enables high spatial resolution and coordinated property measurements directly on the inner layers and at their interfaces.