Direct Fabrication of Arbitrary‐Shaped Ferroelectric Nanostructures on Plastic, Glass, and Silicon Substrates | Zendy

Kim Suenne | Zendy; Bastani Yaser | Zendy; Lu Haidong | Zendy; King William P. | Zendy; Marder Seth | Zendy; Sandhage Kenneth H. | Zendy; Gruverman Alexei | Zendy; Riedo Elisa | Zendy; BassiriGharb Nazanin | Zendy

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Direct Fabrication of Arbitrary‐Shaped Ferroelectric Nanostructures on Plastic, Glass, and Silicon Substrates

Author(s) -

Kim Suenne,

Bastani Yaser,

Lu Haidong,

King William P.,

Marder Seth,

Sandhage Kenneth H.,

Gruverman Alexei,

Riedo Elisa,

BassiriGharb Nazanin

Publication year - 2011

Publication title -

advanced materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 10.707

H-Index - 527

eISSN - 1521-4095

pISSN - 0935-9648

DOI - 10.1002/adma.201101991

Subject(s) - materials science , fabrication , ferroelectricity , silicon , nanostructure , nanolithography , nanotechnology , crystallization , nanoscopic scale , sol gel , oxide , optoelectronics , composite material , chemical engineering , metallurgy , dielectric , medicine , alternative medicine , pathology , engineering

A complementary metal–oxide–semiconductor (CMOS)‐compatible method for the direct fabrication of arbitrary‐shaped Pb(Zr 0.52 Ti 0.48 )O 3 and PbTiO 3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda‐lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol‐gel precursor films. Ferroelectric lines with width ≥30 nm, spheres with diameter ≥10 nm, and densities up to 213 Gb in −2 are produced.

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