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Direct Fabrication of Arbitrary‐Shaped Ferroelectric Nanostructures on Plastic, Glass, and Silicon Substrates
Author(s) -
Kim Suenne,
Bastani Yaser,
Lu Haidong,
King William P.,
Marder Seth,
Sandhage Kenneth H.,
Gruverman Alexei,
Riedo Elisa,
BassiriGharb Nazanin
Publication year - 2011
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201101991
Subject(s) - materials science , fabrication , ferroelectricity , silicon , nanostructure , nanolithography , nanotechnology , crystallization , nanoscopic scale , sol gel , oxide , optoelectronics , composite material , chemical engineering , metallurgy , dielectric , medicine , alternative medicine , pathology , engineering
A complementary metal–oxide–semiconductor (CMOS)‐compatible method for the direct fabrication of arbitrary‐shaped Pb(Zr 0.52 Ti 0.48 )O 3 and PbTiO 3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda‐lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol‐gel precursor films. Ferroelectric lines with width ≥30 nm, spheres with diameter ≥10 nm, and densities up to 213 Gb in −2 are produced.