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Self‐Aligned High‐Resolution Printed Polymer Transistors
Author(s) -
Li Shunpu,
Chen Weining,
Chu Daping,
Roy Saibal
Publication year - 2011
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201101291
Subject(s) - materials science , thin film transistor , transistor , fabrication , optoelectronics , nanotechnology , process (computing) , semiconductor , electronic circuit , solution process , polymer , high resolution , channel (broadcasting) , organic semiconductor , computer science , electrical engineering , layer (electronics) , composite material , telecommunications , voltage , medicine , alternative medicine , engineering , pathology , operating system , remote sensing , geology
A process to fabricate solution‐processable thin‐film transistors (TFTs) with a one‐step self‐aligned definition of the dimensions in all functional layers is demonstrated. The TFT‐channel, semiconductor materials, and effective gate dimention of different layers are determined by a one‐step imprint process and the subsequent pattern transfer without the need for multiple patterning and mask alignment. The process is compatible with fabrication of large‐scale circuits.