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Nanoscale Electronics: Digital Fabrication by Direct Femtosecond Laser Processing of Metal Nanoparticles
Author(s) -
Son Yong,
Yeo Junyeob,
Moon Hanul,
Lim Tae Woo,
Hong Sukjoon,
Nam Koo Hyun,
Yoo Seunghyup,
Grigoropoulos Costas P.,
Yang DongYol,
Ko Seung Hwan
Publication year - 2011
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201100717
Subject(s) - materials science , nanotechnology , nanoscopic scale , fabrication , femtosecond , photolithography , electron beam lithography , lithography , nanolithography , electronics , laser , nanostructure , nanoparticle , optoelectronics , resist , optics , pathology , medicine , alternative medicine , physics , layer (electronics) , chemistry
A digital, direct nanoscale metal patterning method is developed using femtosecond laser digital processing of metal nanoparticles for nanoscale electronics fabrication without using conventional vacuum deposition or a photolithography mask. This method is expected to be a potential alternative to the conventional electron beam lithography method for arbitrary nanoscale direct patterning in single‐step, low‐temperature, and non‐vacuum environments.