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Conductive Atomic Force Microscope Nanopatterning of Epitaxial Graphene on SiC(0001) in Ambient Conditions
Author(s) -
Alaboson Justice M. P.,
Wang Qing Hua,
Kellar Joshua A.,
Park Joohee,
Elam Jeffrey W.,
Pellin Michael J.,
Hersam Mark C.
Publication year - 2011
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201100367
Subject(s) - materials science , graphene , conductive atomic force microscopy , epitaxy , atomic force microscopy , nanotechnology , electrical conductor , electrically conductive , optoelectronics , composite material , layer (electronics)
Conductive atomic force microscope (cAFM) nanopatterning is demonstrated on epitaxial graphene on SiC (0001) under ambient conditions. Nanopatterning kinetics and chemistry suggest that ambient cAFM nanopatterning induces local oxidization with the surface, interface, and bulk layers of epitaxial graphene on SiC (0001) playing distinct roles in the depth profile of the final nanopatterned structure.