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Metamaterials: Micrometer‐Scale Cubic Unit Cell 3D Metamaterial Layers (Adv. Mater. 44/2010)
Author(s) -
Burckel D. Bruce,
Wendt Joel R.,
Ten Eyck Gregory A.,
Ginn James C.,
Ellis A. Robert,
Brener Igal,
Sinclair Michael B.
Publication year - 2010
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201090143
Subject(s) - metamaterial , materials science , schematic , lithography , optics , projection (relational algebra) , resonator , split ring resonator , cubic crystal system , unit (ring theory) , optoelectronics , physics , condensed matter physics , mathematics education , mathematics , algorithm , electronic engineering , computer science , engineering
Membrane projection lithography is used to deposit split ring resonator structures (SRRs) on the interior faces of a cubic SU‐8 cavity in work reported by Bruce Burckel and co‐workers on p. 5053 . The arrows in the inset schematic diagram show three of the five evaporation directions, while the SEM image shows the resulting metamaterial layers with SRRs on each of the five interior faces of the 6‐μm cubic unit cell.