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Rapid Transfer‐Based Micropatterning and Dry Etching of Silk Microstructures
Author(s) -
Tsioris Konstantinos,
Tao Hu,
Liu Mengkun,
Hopwood Jeffrey A.,
Kaplan David L.,
Averitt Richard D.,
Omenetto Fiorenzo G.
Publication year - 2011
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201004771
Subject(s) - micropatterning , fibroin , materials science , silk , biopolymer , dry etching , etching (microfabrication) , nanotechnology , dewetting , wafer , microstructure , composite material , thin film , polymer , layer (electronics)
The silk transfer applied micropatterning (STAMP) method enables patterning of large area silk fibroin protein films with metallic microfabricated features. All processing is performed under ambient conditions in an aqueous environment. The micropatterns fabricated enable masking of biopolymer films for dry etching to produce protein‐based metamaterial structures.