Premium
A Scalable, CMOS‐Compatible Assembly of Ambipolar Semiconducting Single‐Walled Carbon Nanotube Devices
Author(s) -
Ganzhorn Marc,
Vijayaraghavan Aravind,
Green Alexander A.,
Dehm Simone,
Voigt Achim,
Rapp Michael,
Hersam Mark C.,
Krupke Ralph
Publication year - 2011
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201004640
Subject(s) - materials science , ambipolar diffusion , carbon nanotube , parylene , nanotechnology , cmos , annealing (glass) , optoelectronics , dielectrophoresis , scalability , electron , computer science , polymer , physics , quantum mechanics , microfluidics , composite material , database
Semiconducting single‐walled carbon nanotubes are integrated into high‐density arrays using dielectrophoresis, which is a CMOS‐compatible, bottom‐up assembly technique. The devices are statistically analyzed by voltage‐contrast scanning electron microscopy and electron transport measurements. Annealing and the choice of parylene substrate are shown to improve device performance.