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Templated Solid‐State Dewetting to Controllably Produce Complex Patterns
Author(s) -
Ye Jongpil,
Thompson Carl V.
Publication year - 2011
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201004095
Subject(s) - dewetting , materials science , lithography , solid state , nanotechnology , epitaxy , metastability , thin film , engineering physics , optoelectronics , chemistry , physics , layer (electronics) , organic chemistry
Templated formation of complex patterns via solid‐state dewetting is demonstrated. Thin films often dewet from their substrates when they are heated, even while remaining in the solid state throughout the process. It is shown that solid‐state dewetting of epitaxial films can be templated through lithographic pre‐patterning, so as to reproducibly form complex structures with sub lithographic feature sizes.