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Nanotube Arrays: Morphology Control of Nanotube Arrays (Adv. Mater. 29/2009)
Author(s) -
Huang Zhifeng,
Harris Kenneth D.,
Brett Michael J.
Publication year - 2009
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200990111
Subject(s) - materials science , template , nanotube , nanotechnology , etching (microfabrication) , fabrication , morphology (biology) , silicon , coating , carbon nanotube , optoelectronics , layer (electronics) , medicine , alternative medicine , pathology , biology , genetics
On p. 2983 Michael J. Brett and co‐workers demonstrate a template‐directed technique to produce arrays of silicon nanotubes (SiNTs) with highly engineerable morphology. Fabrication steps include glancing angle deposition (GLAD) of the templates, low‐pressure CVD of a shell‐Si coating, ion milling to expose the templates, and wet‐chemical etching for removal of the templates. The technique may be generally adapted to a wide variety of morphologies and NT materials.