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Microelectromechanical Systems: All‐Oxide Crystalline Microelectromechanical Systems: Bending the Functionalities of Transition‐Metal Oxide Thin Films (Adv. Mater. 23/2009)
Author(s) -
Pellegrino Luca,
Biasotti Michele,
Bellingeri Emilio,
Bernini Cristina,
Siri Antonio Sergio,
Marré Daniele
Publication year - 2009
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200990089
Subject(s) - materials science , oxide , substrate (aquarium) , thin film , epitaxy , bending , microelectromechanical systems , cantilever , composite material , transition metal , nanotechnology , optoelectronics , layer (electronics) , metallurgy , catalysis , oceanography , geology , biochemistry , chemistry
Freestanding structures can be employed to induce strain at their surfaces upon bending. Luca Pellegrino and co‐workers show on p. 2377 that a crystalline SrTiO 3 (001) thin film cantilevered structure that can be used as a flexible substrate for the epitaxial deposition of correlated oxide films. Surface strain generated by bending is transmitted to the epitaxial (La,Sr)MnO 3 film producing a reversible change of its electrical resistance.