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Surface Functionalization of Epoxy‐Resist‐ Based Microcantilevers with Iron Oxide Nanocrystals
Author(s) -
Ingrosso C.,
Sardella E.,
Keller S.,
Dohn S.,
Striccoli M.,
Agostiano A.,
Boisen A.,
Curri M. L.
Publication year - 2010
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200904013
Subject(s) - surface modification , photoresist , materials science , epoxy , nanotechnology , fabrication , nanocrystal , oxide , layer (electronics) , chemical engineering , composite material , medicine , alternative medicine , pathology , engineering , metallurgy
A functionalization procedure is integrated in the fabrication of micromechanical SU‐8 cantilevers in order to chemically bind organic‐capped Fe 2 O 3 NCs at the photoresist surface, under visible light, ambient atmosphere and room temperature. The achieved highly interconnected NC multilayer network is demonstrated an active layer for real‐time detection of acetone vapor molecules.

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