Premium
Contact‐Printed Microelectromechanical Systems
Author(s) -
Packard Corinne E.,
Murarka Apoorva,
Lam Eric W.,
Schmidt Martin A.,
Bulović Vladimir
Publication year - 2010
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200903034
Subject(s) - microelectromechanical systems , materials science , fabrication , lithography , digital light processing , scalability , nanotechnology , inkwell , detector , contact print , optoelectronics , computer science , electrical engineering , engineering , composite material , medicine , alternative medicine , projector , pathology , database , computer vision
A process for rapid fabrication of metallic MEMS (microelectromechanical systems) without lithographic processing is presented. Using dimensionally scalable contact printing, 3D electromechanical structures (see figure) are fabricated and functionally tested. Flexible, paper‐thin device arrays produced by this method may enable such applications as pressure sensing skins for people and vehicles, phased array detectors for acoustic imaging, and novel adaptive‐texture display applications.