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Graphene Shape Control by Multistage Cutting and Transfer
Author(s) -
Ci Lijie,
Song Li,
Jariwala Deep,
Elías Ana Laura,
Gao Wei,
Terrones Mauricio,
Ajayan Pulickel M.
Publication year - 2009
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200900942
Subject(s) - graphene , materials science , lithography , etching (microfabrication) , fabrication , enhanced data rates for gsm evolution , nanotechnology , process (computing) , control (management) , computer science , optoelectronics , artificial intelligence , medicine , alternative medicine , layer (electronics) , pathology , operating system
Cutting graphene by a catalytic hydrogenation process can generate graphene pieces with smooth edges of atomic precision and well‐defined shapes. Controlled cutting of graphene by creating graphene step edges by oxidation or plasma etching is demonstrated. A combination of cutting, transfer, and lithography is shown to allow the fabrication of isolated graphene devices with specific edge and shape control.